TopWave 266

The industrial-grade, continuous-wave TopWave deep-UV laser system provides 300 mW output power at a wavelength of 266 nm with excellent power stability and highest reliability. Its complete UV beam path, including the resonant doubling cavity, is enclosed in a specially sealed compartment. In combination with a fully automated shifter of the doubling crystal it enables a typical lifetime of > 10,000 hours, which is key for the use in any industrial application. Consistent beam quality (M² < 1.3) is provided by an optimized beam shaping setup which is also integrated inside the sealed UV section. To avoid contamination of the exit window in non-cleanroom environments the user can connect his purge line to the provided interface.

The TopWave 266 sets new standards with respect to low-noise operation. The narrow linewidth laser emission typically shows < 0.1% RMS, hence the user benefits from an improved signal-to-noise ratio during measurements. Designed for easy integration the TopWave 266 is a turnkey system which the user can control either via a touch panel at the control unit or using the USB/Ethernet interface in combination with a PC GUI. Due to its high wall-plug efficiency the system can be operated with conduction cooling only. In case no proper heatsinking is possible, a closed loop chiller option is available.

The TopWave 266 is ideal for sophisticated measurement and production tasks in e.g. semicon inspection, lithography or Raman spectroscopy. It is a cost-effective and reliable laser that enables the user to concentrate on their application rather than worrying about the light source.