TopWave DUV
Industrial cw UV Lasers
The TopWave DUV laser series was developed based on TOPTICA’s decades long experience in providing high performance, frequency-converted systems.
The industrial-grade, continuous-wave deep-UV laser system is available at three wavelengths 229 nm, 257nm and 266 nm and an output power of up to 300 mW.
Reliability is key in any industrial application, especially in the deep UV. To provide long lifetime and consistent, diffraction limited beam quality (M² < 1.3), the complete UV beam path, is enclosed in a specially sealed compartment. In combination with a fully automated optics shifter this enables typical lifetimes of 10,000 hours.
Key features
- 229 nm, 257nm and 266 nm
- up to 300 mW
- Excellent Power Stability
- Beam quality: M² < 1.3
- Lifetime: > 10.000 h
- Hands-off operation
Applications
- Semicon Inspection/Metrology
- Optics Testing
- Deep UV Raman
- Photoluminescence
- Protein detection
- Lithography / Mask Writing
- Nano structures
- Optical Gratings
| TopWave 266 | TopWave 257 | TopWave 229 | |
|---|---|---|---|
| Wavelength | 266 nm ± 0.5 nm | 257 nm ± 0.5 nm | 228.5 nm ± 0.5 nm |
| Power level | 150 / 300 mW | 15 mW | 10 mW |